Websensarray automation provides productivity enhancements resulting from gains in process tool availability, more efficient use of engineering resources and centralized data storage.

The sensarray gpio port provides for.

With wireless sensor wafers and an automation package,.

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Webcongratulations on your selection of the sensarray platform!

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Webkla's sensarray ® products enable in situ monitoring of process tools' environments and wafer handling conditions.

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30190 SENSARRAY KLA TENCOR PROCESS PROBE INSTRUMENTED WAFER 1530A-8

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30190 SENSARRAY KLA TENCOR PROCESS PROBE INSTRUMENTED WAFER 1530A-8
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